School of Engineering and Technology, (SET) |
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AT81.01 : Microelectronics Fabrication Technology 3(3-0) | ||||||
Course Objectives: | ||||||
This course serves as an introduction to basic processes used in fabricating semiconductor devices and integrated circuits. The objective is to develop the background knowledge necessary to understand the state-of-the-art semiconductor technology related to device fabrication processes. |
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Learning Outcomes: | ||||||
The students on the completion of this course should be able to:
• Apply knowledge on Microelectronics Fabrication Technology in device fabrication
• Analyze the outcomes of fabrication processes
• Decide and recommend the selection of the semiconductor process technologies
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Pre-requisite(s): | ||||||
None |
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Course Outline: | ||||||
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Laboratory Sessions: | ||||||
None |
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Textbook: | ||||||
1. S. A. Campbell: The Science and Engineering of Microelectronics Fabrication, Oxford University Press, Second Edition, 2001
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Reference Books: | ||||||
1. S. A. Campbell: Fabrication Engineering at the Micro and Nanoscale, Oxford University press, 2007
2. R.C. Jaeger: Introduction To Microelectronics Fabrication, 2nd Edition, Pearson, 2001
3. P. V. Zant: Microchip Fabrication: A Practical Guide to Semiconductor Processing, 3rd Edition, McGraw-Hill Education, 2000
4. M. J. Madou: Fundamentals of Microfabrication: The Science of Miniaturization, 2nd Edition, CRC Press ,2002
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Journals and Magazines: | ||||||
1. IEEE Circuits and Devices Magazine, IEEE
2. IEEE Electronics Letters, IEEE
3. IEEE Transactions on Circuits and Systems, IEEE
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Time Distribution and Study Load: | ||||||
Lectures: 45 hours
Presentations: 3 hours
Assignment: 10 hours
Field Trip: 2 hours
Self-study: 90 hours
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Teaching and Learning Methods: | ||||||
The lectures provide the students with the basic understanding of the subject. To increase understanding on the subject and become active learners, the students are required to do field trip, literature review, and presentation. The literature review is the individual assignment. The presentation is a part of the individual assignment for personal development and knowledge sharing.
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Evaluation Scheme: | ||||||
The final grade will be computed from the following constituent parts: mid-term exam (30%), final exam (50%), and assignments/ project/ field trip report (20%). Open-book examination is used for both mid-term and final exam.
An “A” would be awarded if a student can demonstrate clear understanding of the knowledge learned in class as well as from the laboratory assignments and literature reviews.
A “B” would be awarded if a student can understand the basic principles of the knowledge learned in class, from the laboratory assignments and from literature reviews.
A “C” would be given if a student can understand partially the basic principles of the knowledge learned in class, from the laboratory assignments and from literature reviews.
A “D” would be given if a student shows lack of understanding of the knowledge learned in class, from the laboratory assignments and from literature reviews.
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Instructor(s): | ||||||
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