School of Engineering and Technology, (SET)

AT81.07 : Micro-Electro Mechanical Systems 3(3-0)

Course Objectives:

This course focuses on the design and synthesis of Micro-Electro Mechanical Systems (MEMS). MEMS are integration of mechanical elements and electronics on a common silicon wafer using microfabrication techniques. This course focuses on the basic processes used in fabricating MEMS devices and designing MEMS sensors and actuators.

Learning Outcomes:

The students on the completion of this course would be able to:

• Carry out MEMS design including MEMS design, fabrication process, sensor design, and actuator design

• Solve MEMS design problems using appropriate tools

• Design and develop a MEMS based applications

Pre-requisite(s):

None

Course Outline:

I. Introduction

1. Evolution of Microsensors and Microactuators

2. MEMS Overview

3. Emergence of Micromachines

4. MEMS Applications

II. Fundamentals of MEMS Fabrication

1. Introduction and Description of Basic Processes

2. Bulk Micromachining

3. Surface Micromachining

4. Microstereo Lithography for MEMS

III. Principles of Microsensors and Their Fabrication

1. Introduction

2. Fabrication

3. Examples of Microsensors

IV. Principles of Microactuators

1. Introduction

2. Electric Field Driven Actuators

3. Piezoelectric and Magnetic Field Driven Actuator

4. Examples of Microactuators

V. Computer Aided Design of MEMS

1. Introduction to Modeling, Analysis and Simulation

2. MEMS Design Layout

3. MEMS Design Simulation using Finite Element Analysis

Textbook:

Lecture Notes

Reference Books:

1. S.E. Lyshevski: MEMS and NEMS Systems, Devices and Structures, CRC Press, 2002

2. J. W. Gardner,V.K. Varadan, O.O. Awadelkarim: Microsensor MEMS and Smart Devices, Wiley, 2001

3. T. Fukuda, W. Menz,: Micromechanical Systems Principles and Technology, Elsevier, 1998

Journals and Magazines:

1. Sensors and Actuators

2. IEEE transactions on Electron Devices

3. IEEE Journal on Microelectromechanical Systems

4. Micromechanics and Microengineering

5. Mechatronics

Time Distribution and Study Load:

Lectures: 45 hours

Presentations: 3 hours

Self-study: 135 hours

Teaching and Learning Methods:

This course combines a few learning channels. The lectures provide the students with the basic understanding of the subject. To increase understanding on the subject and become active learners, the students are required to do laboratory assignments, literature review, and presentation. The laboratory assignments strengthen their understanding and give them a chance to work in group. The literature review is the individual assignment. The presentation is a part of the individual assignment for personal development and knowledge sharing.

Evaluation Scheme:

The final grade will be computed according to the following components: midsemester exam 20%; final exam 30%; laboratories 10% and project 40%. Open-book examination is used.

An “A” would be awarded if a student can demonstrate clear understanding of the knowledge learned in class as well as from the laboratory assignments and literature reviews.

A “B” would be awarded if a student can understand the basic principles of the knowledge learned in class, from the laboratory assignments and from literature reviews.

A “C” would be given if a student can understand partially the basic principles of the knowledge learned in class, from the laboratory assignments and from literature reviews.

A “D” would be given if a student shows lack of understanding of the knowledge learned in class, from the laboratory assignments and from literature reviews.

Instructor(s):

SECTION	NAME
B