School of Engineering and Technology, (SET)
 
AT79.9005 : Selected Topic: Nanometrology  2(2-0)
 
Course objectives:

The objective of this course is first to acquaint the student with metrology in general and its importance in supporting research and then to introduce the domain of nanometrology- the measurement of nanoscale materials.  Embedded within the course, objective is to show how statistical methods play an integral role in nanometrology.
 
Learning Outcomes:
•      Students learn practical applications of metrology and its importance
•      Students learn the proper way to organize and document data that will stay with them thorugh the life of their scientific or engineering careers
•      Students are prepared to enter the job market
•      Students continue to adapt mathematical skills to solve practical problems
•      Students are prepared to apply their knowledge set to the semiconductor and information industries
 
Pre-requisite(s):
AT79.08 Nanotechnology and Nanomaterials;

Bachelor’s, Master’s degree in any engineering or science fields like physics and chemistry or consent of instructor
 
Course Outline:
I.     Metrology
1.   History
2.   Characterization Methods
3.   Semiconductor Roadmap
4.   State-of-the-Art Metrology
5.   Challenges

II.    Statistical Tools
1.   Significant Figures
2.   Mean and Standard Deviation
3.   Linear Regression and Correlation
4.   Analysis of Variance
5.   Advanced Methods
III.   Nanometrology
1.   Standards, Calibration and Tolerances
2.   Accuracy and Reliability
3.   New Instrumentation and Measurement Techniques
4.   Surface Area Measurements
5.   Classification of Nanostructures

IV.   Quantum Metrology
1.   Standard International Units
2.   Heisenberg Uncertainty
3.   Quantum Triangle
4.   Future of Metrology
 
Laboratory Sessions:

None
 
Learning Resources:

Textbook:
1.     G.L. Hornyak et al., Fundamentals of Nanotechnology, Chapter 2, Nanometrology, CRC Press, 2009
2.     R. Leach, Fundamental Principles of Engineering Nanometrologym 2nd Edition, Elsevier, 2014
 
Reference Books:
1.     Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition, Marc J. Madou, CRC Press, 2 edition (2002), ISBN-10: 0849308267
2.     T. Fukuda et al.: Micromechanical Systems Principles and Technology, Elsevier, 1998
 
Journals and Magazines:
1.     Nanoscale, Royal Society of Chemistry
2.     Small, Wiley-VCH
3.     Nano Letters, ACS Publications
4.     International Journal of Nanomanufacturing, InterScience Publishers

Others:
1.     Nanotechnology Resource Center (NRC)
2.     Internet resources
 
Time Distribution and Study Load:
•      This is a lecture intensive course that is mathematical intensive 2 hours per week
•      Students need to spend 2-4 hours a week on study
•      Assignments are mathematically intensive and require more time to complete (additional 1 hour per week)
 
 
Evaluation Scheme:
30%   Mid-term examination
20%   Assignments
50%   Final examination
Open book type exam is offered

“A” students need to show excellent performance on exams that are a mixture of both quantitative and qualitative aspects (fundamental knowledge) but also excel with simulation projects. The student should be ready after completion of this course to have a comprehensive understanding of nanometrology.
 
Instructor(s):
SECTION NAME